摘要
本文以光干涉原理为基础,分析多光束干涉原理特点及其在平面形貌(平面度)测量中应用可能,提出应用移相方法对被测镀高反膜表面进行调制,得到一系列被调制的干涉图样,经计算机对干涉图样进行自动采集和图像解包裹,获得被测表面的三维形貌数据,并通过实际测试验证了该方法的可行性和科学性。
Based on laser interferometer theory, Multi -wave interferometer by phase -shifting method is applied on high- reflective coated optical flatness measurement. The multi -wave interference patterns are captured and unwraped by image processing computer,3D surface graph of sample is analyzed and calculated. Experiments indicate that the method is practicable and scientific for high -reflective coated optical flatness measurement.
关键词
多光束干涉
移相
解包裹
三维形貌
Multi - wave interferometer
phase - shift
phase unwrapping
3D surface
