摘要
综述了化学气相沉积技术制备薄膜材料的基本原理与工艺,分析了化学气相沉积技术的发展趋势,并展望其应用前景。
A review of the chemical vapor deposition technology was introduced. Discussions inculded the deposition and mechanism technics,in particular,the developing tendency and potential applications were analysed.
出处
《表面技术》
EI
CAS
CSCD
1996年第2期1-3,共3页
Surface Technology
