SnO_2气体传感器的复阻抗谱研究

Study on SnO_2 Gas Sensor by Complex Impedance Spectroscopy

本文研究了静电喷雾高温分解工艺制备的ＳｎＯ２薄膜气体传感器在不同温度与气氛条件下的复阻抗谱，根据等效电路模型与复阻抗谱的变化，分析了电导调制机构与气敏机理，基于气体在晶界与表面吸附效应提出了气体敏感的物理化学模型．

Complex impedance spectroscopy study on SnO2 thin film gas sensor deposited by electrostatic spray Pyrolysis was investigated under different temperatures and atmospheres. According to the change of complex impedance spectroscopy and an equivalent circuit model of SnO2 gas sensor, the conduction modulate mechanisms and sensing fUnction were analyzed. A physicochemical model of gas sensing was presented based on adsorption on the grain boundary.