氮化硅微粉制备技术

Fabrication Technique of Si3N4 Fine Powder

就国内外氮化硅粉末合成的研究情况,按照气相合成法、液相合成法和固相合成法的分类,综述了硅粉直接氮化法、碳热还原二氧化硅法、自蔓延法、热分解法、溶胶凝胶(sol-gel)法、高温气相反应法、激光气相反应法和等离子体气相反应法等几种主要的氮化硅粉末制备方法,介绍了各种制备方法的最新研究进展,并从产品质量、成本和生产规模等角度分析比较了各种制备方法的特点,指出了制备氮化硅粉末的主要发展方向。

In terms of the research situations for SiaN4 powder syntheses methods, the direct nitridation, carbothemal reduction,self-propagation high-temperature synthesis（SHS）, ammonolysis of Si3C14, sol-gel, chemical vapor deposition （CVD）, laser induced chemical vapor deposition （LICVD）, and plasma chemical vapor deposition（ PCVD ） were comprehensively reviewed. The latest development was stated in all different preparing methods of SiaN4 fine powder,with characteristics on each method compared and analysed in view of products＇ quality.cost and production scales.The domain direction was pointed out for Si3Cl4 fine powder to be developed and fabricated.