一种用于光纤F-P传感器的微纳米级微位移工作台的研究

Study on a Novel Worktable on Nano-micron Order Based on the Elastic Theory for Optical Fiber Fabry-Perot Sensors

标定光纤F-P传感器这种微纳米级位移传感器非常困难。分析常用的微位移技术优缺点,这里提出了一种基于弹性变形原理的工作台的设计方法。建立了工作台位移变形的数学模型,对其产生位移的误差进行了理论分析。在此基础上,实际设计并开发了实验系统,用德国he idenha iyn光栅位移传感器对光纤F-P传感器进行了标定实验。大量的标定实验证明,该微位移工作台的不确定度为0.1μm。

The precision of optical fiber Fabry-Perot sensors is on micron order. So it is difficult to calibrate it. In order to solve this problem, a novel worktable based on the elastic theory is proposed. The principle of generating displacement which applies elastic theory is explained and the error of displacement is analyzed based on the character of optical fiber Fabry-Perot sensors. Furthermore, the experimental system is designed and set up. The experimental results show that the novel worktable based on the elastic theory has the displacement accuracy of 0.1μm,