微型热敏传感器系统动态特性理论研究

Investigation in the Dynamic Characteristic of the Micro Thermal Sensor System

通过分析用于检测流体参数的微型热敏传感器的工作原理,针对恒流和恒温驱动电路驱动的此类传感器组成的系统,提出了对微型热敏传感器系统动态特性分析的依据和计算设计方法。并且通过对一阶恒流电路驱动传感器系统的时间常数和二阶恒温电路驱动传感器系统的响应频率的计算和分析,得到基于M EM S技术的热敏传感器系统的时域、频域参数的计算和设计依据,为此类传感器的器件设计和性能分析提供了重要的参考依据。

Through analyzing the operating principle of the micro thermal sensor, associating with the two types of drive circuits, the calculation and analysis methods of temporal and frequency characteristics of MEMS thermal sensor are got. Then the first order constant current sensor system and the second order constant temperature sensor system are investigated, and the design basis of the temporal and frequency characteristics of this type sensor is presented, it can offer reference to thermal sensor＇s device design and performance analysis.