镜头埋入深度的组合测量方法

Lens Embedding Depth Measurement with Multi-Sensor Integration System

根据精密摄像系统中摄像头实际安装工况,为了避免传统的点接触测量法的缺点,提出了多电容传感器组合的非接触式镜头埋入深度测量法．采用电容传感器测量,可实现非接触测量,仪器体积小巧,精度高达0．1μm．此外,利用多个传感器对环境敏感而漂移的同向性,抑制了单一传感器数据的漂移,提高了测量的稳定性,克服了单一传感器无法进行形位误差测量的缺陷．标定和现场实验证明了该方法的可行性,系统测量精度达到2μm．

According to the real fixing conditions of the camera of precision camera system, a non-contact method is designed to measure the lens embedding depth using multi-sensor to avoid the drawback of the traditional point-contact method. Capacitance measurement has high precision which can reach 0.1μm, and does not contact the lens. Furthermore, multi-sensor integration is sensitive to the change of the environment, such as the temperature variation, then drifts the output in the same direction. This will restrain the data deviation in comparison with using one single sensor, thus the stability can be enhanced. The experiment proves the feasibility of this method, the precision of measurement can reach 2μm.