荷电粒子光柱成象系统中空间电荷象差之解析计算

ANANALYTICALCALCULAT10N0FsPACECHAKGE ABERRATIONS IN AN IMAGING SYSTEM OF A CHARGED PAKTICLE OPTICAL COLUMN

本文首先讨论粒子光学柱成象系统中空间电荷象差的概念，然后提出用梯形束元作为同时计算空间电荷象差、几何象差、色差和衍射象差的统一模型；最后，在此模型基础上推导并提出了所有计算成象系统中空间电荷象差的解析表达式。

The space charge aberrations in an imaging system of a particle optical column are discussed in this paper at first.Then,the trapezoidal beam segment is put forward as an united model for calculating the space charge aberrations,the geometrical aberrations,the chromatical aberrations and the diffraction aberration simultaneously. Finally,with this model all analytical formulae of evaluating the space charge aberrations in an imaging system are derived and presented.