摘要
本文提出一种新型三维形貌测量方法,该方法通过投影装置将剪切干涉条纹投射到物体表面,以获取调制光栅图。采用相位法,由计算机生成虚拟接收光栅,从一幅调制光栅图重建物体形貌。文中给出了实验结果和性能分析。
A novel approach to measure and reconstruct the shape of 3-D objects is presented.Themethod is based on the principle of phase-measuring profilometry with shearing interferometryinstrument and virtual grating。The 3-Dshape is reconstructed from an image of deformed fringes.Experimental results and a performance analysis are presented.
出处
《光子学报》
EI
CAS
CSCD
1996年第5期468-474,共7页
Acta Photonica Sinica
基金
国务院侨办重点学科科研基金