现代硅传感器的研制与开发——以微系统为目标、以微电子及微机械加工技术为基础的实用化、集成化和多功能化硅传感器的研制与开发

Research and Development of Microsystem Oreinted, Comercialized, Integrated and Multi-functional Silicon Sensors Based on Microelectronic and Micromachining Techuology

本文对1989年6月26日至30日在瑞士蒙特洛举行的第五届国际固态传感器与执行器会议进行综合介绍。重点指出该领域的技术发展:如硅微系统技术与硅微机械加工技术,硅片直接组合技术,多功能与集成技术,最后提出一些讨论和建议。

This paper provides an overview of the 5th international solid state sensors and actuators conference (Transducers'89) held in Montreux, Switzerland, 26-30 June 1989. Emphasis is placed on the main developments in the sensors and actuators field, microsystem and microdynamics, silicon wafer direct bonding technology (SDB), multi- functionalization and integration of sensors and finally, discussion and suggestions are presented.