离子辐照引起的金属/绝缘体界面混合与相变研究

Intermixing and Phase Change at Metal/Insulator Interface Induced by Energetic Ion Irradiations

载能离子穿过固体界面引起界面原子迁移使界面原子混合和物质成分变化,从而导致界面发生材料相变。简要介绍了载能离子辐照引起金属/绝缘体界面混合效应及相变现象的主要实验研究进展、低能离子和高能离子辐照引起金属/绝缘体界面现象差异,并对离子辐照引起界面混合及相变的机制进行了初步探讨。

When penetrating an interface between two kind of solids, energetic ions can induce atomic diffusion at both sides of the interface and then result in intermixing, atom re-distribution or composition change, as well as phase transformation. Main progress on the study of intermixing and phase change at metal/insulator interface induced by energetic ion irradiations, the difference of phenomena occurred at metal/insulator interfaces induced by high-and low-energy ions were briefly reviewed. Furthermore, the possible mechanisms related to intermixing and phase change at metal/insulator interface produced by energetic ion irradiations were also discussed in short words.