一种新颖的MEMS光开关测量平台的设计与实现

A New Method for Estimating and Measuring Drive Voltage of Torsion Beam Structure Micromechanical Optical Switches

近年来,随着光电器件的广泛应用,微机械光开关(MEMS)成为核心光交换器件的主流。在研发过程中,其器件检测手段成为人们所关注的话题。文章介绍了一种新颖的测量平台,通过高幅值利用单片机控制脉冲频率的方法来选择器件。与当前同类方法相比,具有精度高、可靠性强、成本低、易操作等特点,具有广阔的使用前景。

Recent advances in optical devices and computer technology have enabled the development of new optical systems and techniques for measurement. Designing and measuring small structures such as micromechanical optical switches necessitates various devices, which may bring errors. This paper introduces the theoretical elements of algorithms for torsion beam structure micromechanical optical switches. It presents microcontroller techniques to effectively analyze and test high-performance optical systems. Provides a new and elaborated method for estimating and measuring drive voltage of torsion beam structure micromechanical.