摘要
基于各个激光参数对加工微孔的影响以及激光在阈值附近工作时光束质量较好的优点,采用声光调QNd∶YAG脉冲激光器进行阈值附近的微孔加工,在0.7mm的镀锌钢板上获得了直径为15μm的微孔,深径比超过50,打孔成功率为100%。实验证实了此方法能实现高质量微细孔的激光制备。
According to the influence of each laser parameter on processing and the advantage that a laser can achieve high laser quality nearby the last threshold,AOM Q-switched Nd：YAG pulsed laser is adopted for microdrilling. As a result,the 15μm microhole in 0.7mm-thick zincification plate steel is obtained, and the ratio of depth and width is over 50,100% drilling rate is acquired. This method can achieve high quality laser microdrilling based on experiment.
出处
《激光技术》
CAS
CSCD
北大核心
2006年第3期292-294,共3页
Laser Technology
基金
北京市科技新星基金资助项目(954810900)
国家自然科学基金资助项目(604070090)
关键词
激光技术
微孔加工
激光阈值
声光调Q
激光打孔
laser technique
microdrilling
laser threshold
AOM Q-switch
laser drilling
