超纯水制造系统中关于TOC的去除、检测和控制管理

TOC Removal,Monitor and Running control in Ultrapure Water Treatment System

就半导体工厂超纯水制造系统中的一个重要污染物TOC进行了比较全面的分析和说明,阐述了超纯水制造系统中TOC的来源、去除方法、检测手段以及控制管理,对半导体工厂的制水管理人员有很好的借鉴作用。

This paper introduced the important contamination of TOC in Ultrapure water treatment system,explained TOC source,methods of TOC removal,TOC monitoring and running control. It will provide experience for persons running Ultrapure water treatment system in semiconductor factory.