数字散斑干涉计量中的相位测量

Phase Measurement in Digital Speckle Interferometry Metrology

针对散斑干涉计量的特点,结合相移相位测量技术,提出利用物体本身变化产生的相位变化来实现散斑干涉计量中相位的测量方法,从而得到不同时刻物体的相位变化.通过对计算机模拟漫射体产生离面倾斜的时变散斑图,计算其均方根误差值,进行了验证.

Based on the characteristic of speckle interferometry, a novel phase measurement method is attained by use of the phase variation of the object and the phase-shifting technique, and phase variation at different time. The out-of-plane tilting speckle interferogram is computer-simulated and the RMS phase error is calculated to verify reliability.