用于微机电系统的磁流体微泵的研究

Study on the magnetic fluid micro-pump used in the MEMS

利用外磁场及其运动控制微机电系统中的磁流体的运动,成功地设计了磁流体微泵,试验表明:磁流体微泵的输出压力最高达到1180 Pa,输出流量最大可达50μl/m in,磁场转速和输出压力、输出流量的在低转速时几乎线性关系,但超过一定的转速,输出流量和压力将迅速下降。为微机电系统提供可靠的驱动元件。

A new micro -pump was successfully designed by using the magnetic fluid movement controlled by the external magnetic field. The experimental results show that the maximum output pressure is 1180 Pa, and the maximum output flow -rate is 50 μl/min, the relation between output pressure, flow - rate and rotation velocity is nearly linear when the rotation velocity is smaller. However, the output pressure and flow rate fall quickly when the rotation velocity exceeds a critical value. An excellen. fluid driving component for the MEMS was supplied.