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AlN插入层与AlGaN/GaN HEMT电流崩塌效应的关系 被引量:2

Correlations Between an AlN Insert Layer and Current Collapse in AlGaN/GaN HEMTs
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摘要 比较有无AlN插入层AlGaN/GaNHEMTs在直流偏置应力条件下的电流崩塌程度,研究AlN插入层对电流崩塌的影响.从测试结果看,无AlN插入层的AlGaN/GaNHEMTs有更显著的电流崩塌程度,表明AlN插入层对电流崩塌效应有显著的抑制作用.模拟的AlGaN/GaN能带结构表明,AlN插入层能显著提高AlGaN导带底能级,增加异质结的带隙差.带隙差的增加有利于减小电子遂穿几率,加强沟道二维电子气的量子限制,从而抑制电流崩塌效应. Based on a comparison of the degree of drain current collapse in AlGaN/GaN HEMTs with and without an AlN insert layer under short-term DC bias stress, the effects of an AlN insert layer on current collapse induced by DC bias stress are investigated. Under some DC bias stress, the degree of drain current collapse of AIGaN/GaN HEMTs with an AIN insert layer is less prominent than that with no AlN insert layer, indicating that an AlN insert layer can inhibit current collapse effectively. The energy band structures of AlGaN/GaN HEMTs with and without AlN insert layers make clear that an AlN insert layer raises the conductance band and increases the effective heterostructure band discontinuity △Ec prominently, which is beneficial for strengthening the quantum limitation of 2DEG and decreasing the probability of hot electron tunneling through the AIGaN barrier layer to the surface. Therefore, an AlN insert layer appears to inhibit current collapse.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2006年第6期1055-1058,共4页 半导体学报(英文版)
基金 国家重点基础研究发展计划(批准号:2002CB311903) 中国科学院重点创新(批准号:KGCX2SW107)资助项目~~
关键词 AlN插入层 HEMTS 电流崩塌效应 热电子 AlN insert layer HEMTs current collapse effect hot electron
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参考文献13

  • 1Chini A,Coffie R,Meneghesso G,et al.2.1A/mm current density AlGaN/GaN HEMT.Electron Lett,2003,39 (7):625
  • 2Saito W,Takada Y,Kuraguchi M,et al.High breakdown voltage AlGaN-GaN power-HEMT design and high current density switching behavior.IEEE Trans Electron Devices,2003,50(12):2528
  • 3Kikkawa T,Maniwa T,Hayashi H.An over 200-W output power GaN HEMT push-pull amplifier with high reliability.IEEE MTT-S Digest,2004:1347
  • 4Meneghesso G,Verzellesl G,Pierobon R,et al.Surface-related drain current dispersion effects in AlGaN/GaN HEMTs.IEEE Trans Electron Devices,2004,51(10):1554
  • 5Hyungtak K,Thompson R M,Tilak V,et al.Effects of SiN passivation and high-electric field on AlGaN-GaN HFET degradation.IEEE Electron Device Lett,2003,24 (7):421
  • 6Mittereder J A,Binari S C,Klein P B,et al.Current collapse induced in AlGaN/GaN high-electron-mobility transistors by bias stress.Appl Phys Lett,2003,83 (8):1650
  • 7Hyungtak K,Vinayak T,Bruce,et al.Degradation characteristics of AlGaN/GaN high electron mobility transistors.Annual International Reliability Physics Symposium,2001:214
  • 8Simin G,Koudymov A,Fatima H,et al.SiO2/AlGaN/InGaN/GaN MOSDHFETs.IEEE Electron Device Lett,2002,23(8):458
  • 9Fan Z Y,Li J,Lin J Y,et al.Delta-doped AlGaN/GaN metal-oxide-semiconductor heterostructure field-effect transistors with high breakdown voltages.Appl Phys Lett,2002,81(24):4649
  • 10Weimann N G,Manfra M J,Wachtler T,et al.Unpassivated AlGaN-GaN HEMTs with minimal RF dispersion grown by plasma-assisted MBE on semi-insulating 6H-SiC substrates.IEEE Electron Device Lett,2003,24 (2):57

同被引文献22

  • 1Takagi K, Masuda K, Kashiwabara Y, et al. X-band A1GaN/GaN HEMT with over 80W output power. IEEE Compound Semiconductor Integrated Circuit Symposium,2006:265.
  • 2Mittereder J A, Binari S C, Klein P B, et al. Current collapse induced in AIGaN/GaN high-electron-mobility transistors by bias stress. Appl Phys Lett, 2003,83 (8) : 1650.
  • 3Edwards A P, Mittereder J A, Binari S C, et al. Improved reliability of AIGaN-GaN HEMTs using an NH3 plasma treatment prior to SiN passivation. IEEE Electron Device Lett, 2005,26 (4) : 225.
  • 4Adivarahan V, Yang J, Koudymov A, et al. Stable CW operation of field-plated GaN-AIGaN MOSHFETs at 19W/mm. IEEE Electron Device Lett,2005,26(8) -535.
  • 5Tilak V, Green B, Kim H, et al. Effect of passivation on AIGaN/ GaN HEMT device performance. IEEE International Symposium of Compound Semiconductors, 2000,10 (2) : 357.
  • 6Gillespie J K, Fitch R C, Sewell J, et al. Effects of Sc2 03 and MgO passivation layers on the output power of AIGaN/GaN HEMTs. IEEE Electron Device Lett, 2002,23 (9) : 505.
  • 7Liu Jie, Shen Bo, Wang Maojun, et al. Pt/Au Schottky contacts to modulation-doped Al-Gal-x N/GaN heterostructures using predeposition surface treatment. Chin Phys Lett, 2002,19 (12): 1853.
  • 8Kunii T, Totsuka M, Kamo Y, et al. A high reliability GaN HEMT with SiN passivation by cat-CVD. IEEE Compound Semiconductor Integrated Circuit Symposium, 2004,10 (24) .197.
  • 9Hashizume T, Ootomo S, Hasegawa H, et al. Chemistry and electrical properties of surfaces of GaN and GaN/A1GaN heterostructures.J Vac Sci Technol B,2001,19(4) :1675.
  • 10Hideki H, Tamotsu H. Properties of surface states on GaN and related compounds and their passivation by dielectric films. Mater Res Soc Symp Proc, 2003,743 .. L2.6.1.

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