摘要
A two-dimensional polystyrene photonic crystal microcavity is fabricated by the method ot tocused ion Oeam etching. The scanning electron microscopy and the transmittance spectrum are used to characterize the properties of the photonic crystal microcavity. The quality factor and the transmittance of the photonic crystal microcavity is more than 530 and 90%, respectively. The measured results are in agreement with the theoretical predictions.
A two-dimensional polystyrene photonic crystal microcavity is fabricated by the method ot tocused ion Oeam etching. The scanning electron microscopy and the transmittance spectrum are used to characterize the properties of the photonic crystal microcavity. The quality factor and the transmittance of the photonic crystal microcavity is more than 530 and 90%, respectively. The measured results are in agreement with the theoretical predictions.
基金
Supported by the National Natural Science Foundation of China under Grant Nos 10521002, 10574007, 10434020, 10328407, and 90501007.
