摘要
Six kinds of micro bridge-beam specimens with different sizes are fabricated using photolithography technology for bending test. Beam specimens with trapezoidal section could be representatives of those with rectangle and square section, which are usually applied in MEMS. Nano indentation method used in bending test can be applied to both elastic and plastic materials. Also, some mechanical properties parameters such as the modulus of elasticity, hardness and the bending strength are obtained. The average modulus of elasticity of SCS is 170.295 0±2.485 0 GPa, showing no size effects, but the bending strength ranges from 3.24 GPa to 10.15 GPa, displaying strong size effects, and the average hardness is 9.496 7±1.753 3 GPa,in which no obvious size effects are observed.
Six kinds of micro bridge-beam specimens with different sizes are fabricated using photolithography technology for bending test. Beam specimens with trapezoidal section could be representatives of those with rectangle and square section, which are usually applied in MEMS. Nano indentation method used in bending test can be applied to both elastic and plastic materials. Also, some mechanical properties parameters such as the modulus of elasticity, hardness and the bending strength are obtained. The average modulus of elasticity of SCS is 170.295 0±2.485 0 GPa, showing no size effects, but the bending strength ranges from 3.24 GPa to 10.15 GPa, displaying strong size effects, and the average hardness is 9.496 7±1.753 3 GPa,in which no obvious size effects are observed.
