摘要
研究开发了一种能实现大量程位移和纳米级定位精度的一维位移工作台。工作台采用粗、精两级定位机构，以精密衍射光栅传感器组成工作台位移的闭环检测系统。工作台可以实现0～6mm的位移及1nm的定位分辨力。文中建立了由压电陶瓷驱动和柔性铰链导向的精定位机构的机电耦合模型，进行了精定位机构的模态分析和静力学分析，并采用ANSYS软件进行了有限元仿真运算。最后给出了工作台在表面三维微观形貌测量仪中的应用结果。
A novel 1-DOF displacement stage with large motion range and nano-positioning precision was developed. The stage is a set of two-grades mechanism by coarse and fine positioning,and a diffraction grating is fixed to the stage to form a close loop displacement measuring system. The displacement range of the stage is 0-6 mm and the positioning resolution is 1 nm. A electromechanicel coupling modal of PZT actuated and flexure hinge guided fine positioning mechanism was established, its model and mechanics analysis was performed. The finite element analysis soft ANSYS was also used to simulate the behavior of the stage and an application example was presented at the last of the paper.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2006年第3期428-433,共6页
Optics and Precision Engineering
基金
国家自然科学基金项目(No.50175037)
