摘要
将宏机械柔性铰链设计思想应用到硅微机械机构设计中,采用表面硅牺牲层工艺制作了结构层厚度为2 μm 的多晶硅薄膜型微机械柔性铰链及在线测试机构,对微米尺度柔性铰链的微机械性能进行了理论和试验研究。以直圆型多晶硅薄膜柔性铰链为例,对其转动刚度采用现有宏机械柔性铰链理论的计算值为8 N·μm／rad,试验测试结果为120N·μm／rad。宏理论计算和微机械测试结果之间的偏差较大,这表明在微尺度效应的影响下,宏机械柔性铰链理论模型不能直接用于薄膜型硅微机械柔性铰链的计算。根据试验数据对宏机械柔性铰链计算公式进行了修正,得到了描述薄膜型硅微机械柔性铰链静态特性的近似经验公式,可满足薄膜型硅微机械柔性铰链的设计与计算。
The structural style of steel flexure hinge is applied to design of silicon micromachining structures. Polysilicon thin film flexure hinges and the on line testing device are fabricated using surface micromachining process, and the thickness of structure layer is 2μm. Character of polysilicon thin film flexure hinge is researched and tested. Take right circular polysilicon thin film flexure hinge as an example, the rotational stiffness calculated using the macro theory is 8 N-μm/rad and the tested result is 120 N·μm/rad. Through theory analysis and measurements, it is found that the macroscopic machine model of flexure hinge could not be applied for the design of micromachining thin film flexure hinge properly because of the size-effect. According to experimental data, the formula used in macroscopic machine is modified to meet the design and calculation of micromachining thin film flexure hinge.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2006年第6期193-198,共6页
Journal of Mechanical Engineering
基金
国家自然科学基金(50135054)
上海市科技发展基金(0111nm020)资助项目。
