A cathodic arc enhanced middle-frequency magnetron sputter system for deposition of hard protective coatings
被引量：1
A cathodic arc enhanced middle-frequency magnetron sputter system for deposition of hard protective coatings
基金
SupportedbytheNationalNaturalScienceFoundationofChinaundercontractNos.10275049and10435060.
关键词
阴极弧
中频磁控管溅射
类金刚石碳
内靶
Cathodic arc, Middle frequency magnetron sputtering, Diamond-like carbon.
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