Ti离子注入H13钢表面改性研究

Surface Modification of H13 Steel by Ti-Ion Implantation

利用MEVVA源强流离子注入机将Ti离子注入到H13钢表面，注入剂量和离子能量分别为0．5×10^17-5．0×10^17ions／cm^2和105keV。利用TRIM2003程序模拟计算饱和注入剂量；通过显微硬度仪、磨损试验机、电化学测试系统和扫描电镜测试了注入前后H13钢的表面硬度、磨损性能、摩擦系数和耐蚀性。利用SEM、AES、XPS和EDX等分析手段对注入前后的材料表面形貌、注入元素的化学价态及浓度分布等进行分析。借助XPS考察了注入表面层钛元素的化学状态。结果表明，Ti离子注入显著提高了H13钢的表面硬度、耐磨性和耐蚀性，减轻了磨粒磨损；减轻了表面层铁元素的氧化。通过所测主要性能可知，利用钛离子注入改善H13钢较为经济有效的注入参数分别为1．0×10^17ions／cm^2和105keV。

The titanium ion implantation was done using a metal vapor vacuum arc（MEVVA） ion source. Titanium implantation was carried out at the chosen ion doses 0. 5×10^17-5.0×10^17ions/cm^2 with the energy of 105 keV. The saturated dose of Ti ions implantation was calculated by using the program TRIM2003. The surface hardness, wearability and corrosion resistance were observed and measured, such as the surface morphology was observed by SEM,the element content was analyzed by EDX, the chemic state of elements was determined by XPS, and the concentration distribution of implanted ions was measured by AES. The results show that the surface hardness, wearability and corrosion resistance for implanted titanium steels were remarkably improved, while the abrasive wear was alleviated. As shown by the experimental results,the titanium implantation alleviated the oxidation of ferric element on the surface of H13 steel. By comparing the general properties tested in this paper, the results suggest that the optimum processing parameters for H13 steel are under the dose of 1.0×10^17/cm^2 with the energy of 105 keV.