引信用MEMS加速度传感器敏感元件的设计

Design of the Sensing Element of MEMS Accelerometer used in the Fuze

根据引信环境信息探测的要求,设计了一种新型MEMS高g值压阻式加速度传感器敏感元件。通过ANSYS仿真对该结构进行了量程分析、抗过载分析、灵敏度分析及横向灵敏度分析,提供了一种新的阻尼设计方法。结合过载保护设计,较好地实现了结构阻尼控制与过载保护的融合。最后设计了一套可行的加工工艺。

Under the request of the detection of the circumstances of the fuze, a new MEMS high g piezoresistive accelerometer sensing element was designed, the measuring range, antioverloading ability, sensitivity and transverse sensitivity of the structure were analyzed, a new method of damping design was supplied and combined with overloading protection design, which preferably completed the combination of damping control and over loading protection. Finally, a suit of feasibly processing method was supplied.