长期存放条件下TFT阵列基板栅金属线腐蚀原因分析

The Corrosion of the TFT's Metal Lines

在TFT-LCD制造和存放过程中,存在着电化学腐蚀的环境,由于腐蚀速度相对较慢,所以对此现象的认识和研究不足。本文通过实例分析,研究了栅金属电极线在大气环境下的腐蚀现象和机理,并提出了降低腐蚀的措施。

The environment of the TFT-LCD producing and storing process can be able to result in the electrochemical corrosion. The knowledge and research about it are very little because of its slow corroding speed relatively. In this paper the phenomenon and principle of the metal lines corroded in the atmosphere of the cleaning room are discussed by the practical example, and the ways to depress the corrosion are also put forward.