摘要
锆钛酸铅镧(Pb1-xLax(Zr1-yTiy)1-x/4O3)铁电材料是一种具有优越铁电、介电、压电和热释电性能的材料,在微电子领域有着广泛的应用前景。本文概括介绍了Pb1-xLax(Zr1-yTiy)1-x/4O3薄膜的研究意义、基本结构、制备方法、研究现状和应用展望;并对现阶段薄膜研究过程中的一些问题做了简要叙述。
Ferroelectric Pb1-x Lax （Zr1-y Tiy）1-x/4 O3 thim films have excellent ferroelectric, dielectric, piezoelectricity and pyroelectricity properties, and a promising application prospect in the field of microelectronics. The research backgrounds, basic structures, preparation methods, characterizations of thin f 1m properties, development of researches and applications are summarized in this article. The several important problems of the current researches of Pb1-xLax （Zr1-yTiy） 1-x/4 O3 thin films are also discussed in detail based on the acquired research results.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2006年第3期539-544,共6页
Journal of Synthetic Crystals
关键词
铁电/介电薄膜
PLZT
光电特性
ferroelectric/dielectric thin film
effect plambum lanthanum zirconium titanium
photoelectric
