KDP晶体超精密加工表面硬度压痕尺寸效应研究

Hardness indentation size effect of KDP crystals for ultra-precision machining surface

对KDP晶体单点金刚石切削加工近表层力学性能方面的有关问题进行深入研究,对KDP晶体(001)和(100)面在不同载荷作用下的硬度和裂纹长度进行了检测,系统地分析了压印载荷对维氏硬度和裂纹长度的影响.对KDP晶体维氏硬度的检测结果表明,压印尺寸效应是存在的,即随着压印载荷的逐渐减小,硬度的值逐渐增加.

Potassium Dihydrogen Phosphate （KDP） is a non-linear optical material used for laser frequency conversion and electrooptic modulators, KDP has several weak points such as soft, brittle and deliquescent from the machining point of view, it is typically diamond machined. In this paper, the near-surface mechanical properties have been investigated in detail, Vickers Hardness of KDP crystals on （001） and （100） plane is also examined under different loads, then the influence of the indentation load on Vickers hardness and crack length are analyzed systematically, the Vickers hardness measurement of KDP crystals shows the indentation size effect, according to which the hardness increases as the indenting load is diminished.