摘要
The highly （1301） oriented triple system of [CoPt/C]n/Ag films was deposited on glass substrates by DC and RF magnetron sputtering. After annealing at 600℃ for 30 min, thin films become magnetically hard with coercivities in the range of 160-875 kA/m because of high anisotropy associated with the L10 ordered phase. C doping plays an important role in improving （001） texture and reducing the intergrain interactions. The oriented growth of CoPt films was influenced strongly by the number of repetitions （n） of CoPt/C. By controlling the C content and the number of repetitions （n） of CoPt/C, nearly perfect （001） orientation can be obtained in the [CoPt3nm/C3nm]5/Ag50 nm.
The highly （1301） oriented triple system of [CoPt/C]n/Ag films was deposited on glass substrates by DC and RF magnetron sputtering. After annealing at 600℃ for 30 min, thin films become magnetically hard with coercivities in the range of 160-875 kA/m because of high anisotropy associated with the L10 ordered phase. C doping plays an important role in improving （001） texture and reducing the intergrain interactions. The oriented growth of CoPt films was influenced strongly by the number of repetitions （n） of CoPt/C. By controlling the C content and the number of repetitions （n） of CoPt/C, nearly perfect （001） orientation can be obtained in the [CoPt3nm/C3nm]5/Ag50 nm.
基金
This work was financially supported by the National Natural Science Foundation of China (No. 10574085) and the Natural Science Foundation of Shanxi Province, China (No. 20041032)
