摘要
环形子孔径法是一种无需辅助元件就能实现对大口径、大相对口径非球面检测的“柔性”测试技术。介绍了该技术的工作原理,对两种分别基于测量相位值和Zernike多项式系数的拼接算法进行了仿真分析,并进行了初步的原理性实验验证。结果表明该技术是切实可行的,具有检测大口径非球面镜的潜能。最后,在对现有研究结果综合分析的基础上,提出了应用该技术检测m量级非球面主镜的实验方案。
Annular subaperture test method has been developed for low cost and flexible measurement of large, fast aspheric surfaces without any special elements. The measurement principle of this method is simply introduced. The two representative algorithms based on discrete phase values and Zernike polynomials are numerically analyzed, and the result of primary experiment is provided. The results show that the method is feasible and provided that the potential for testing large aspheric mirror. According to the integrative analysis of the above research results, the experimental scheme of testing meter-class aspheric mirror with annular suhaperture method is presented.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2006年第5期705-708,共4页
High Power Laser and Particle Beams
基金
国家863计划项目资助课题
关键词
光学测量
干涉计量
大口径非球面
环形子孔径
拼接算法
Optical measurement
Interferometry
Large aspheric mirror
Annular subaperture
Stitching algorithm