MIS结构电容器的湿敏特性研究

Study on Humidity Sensitive Characteristics of MIS Structure Capacitor

在室温情况下，研究了MIS结构电容器的湿敏特性。用交流串联电路，测量其电流与相对湿度和频率的依赖关系，实验结果表明：此结构有良好的感湿灵敏度和短的响应时间。其中相对湿度从12％变化到98％时，在较宽频率范围（10^2～10^5Hz）内，元件的电流有较大的变化。还对器件的物理模型进行了分析。

Studied were the humidity sensitive characteristics of MIS structure capacitor. The relationships of I-f and I-RH for MIS structure capacitor were measured by AC series circuit. Obtained results show that the structure is sensitive to humidity and has short respond time. And the current of sensor has bigger change when RH changes from 12% to 98% and the frequency range is 10^2～10^5 Hz. Next, physical model of the device is also analysed.