微机电系统多学科设计优化

MULTIDISCIPLINARY DESIGN OPTIMIZATION OF MICRO ELECTRO MECHANICAL SYSTEMS

多学科设计优化是一种针对于涵盖多个学科领域的复杂系统进行设计优化的方法,强调各子学科系统在独自设计优化的基础上的相互之间的并行协作。鉴于微机电系统(Micro electro mechanical systems,MEMS)设计中存在多学科交叉耦合等问题,将多学科优化设计方法引入到MEMS的设计中,研究分析MEMS本身的多学科特性和设计现状,建立面向MEMS的多学科设计优化系统(Micro electro mechanical multidisciplinary design optimization system,MMDOS),提出四种多学科设计优化方法,对提升MEMS的设计水平和产品质量具有积极意义。

Multidisciplinary design optimization （MDO） is a methodology for the design of complex system, the aim of which is to emphasize the interaction between the several disciplines in their respective design optimization. Considering the problem of coupling between several different disciplines in the design of micro electro mechanical systems （MEMS）, MDO method is introduced to handle this problem. In studying multidisciplinary character and current design status of MEMS, a novel MDO framework for MEMS - MMDOS is established, and four kinds of method of MDO are presented, which will help to raise the design level and improve the product quality.