定向碳纳米管薄膜的制备

Synthesis of Vertically Aligned Carbon Nanotubes Using Thermal Chemical Vapor Deposition

以二茂铁为催化剂前驱体,氢气为载气,乙炔为碳源,硅片作衬底,用化学气相沉积法,采用不同的催化剂引入方式,在700℃下分别制备出定向碳纳米管薄膜及非定向碳纳米管薄膜。并基于实验结果对影响生长定向碳纳米管的因素进行分析,表明催化剂颗粒的诱导作用是导致生长定向碳纳米管的重要原因。

Using different ways to introduce catalyst, both vertically aligned carbon nanotubes layers and randomly oriented carbon nanotubes layers are grown on silicon substrates at 700℃ by thermal decomposition of acetylene. The structures of different carbon nanotubes samples are investigated by scanning electron microscopy. It is found that the catalyst inducement greatly affects the alignment of carbon nanotubes.