摘要
随着新工艺和新技术的不断出现,涂层方法越来越多,膜的种类也层出不穷。氮化钛薄膜因具有许多优良的性能而得到了广泛的应用。介绍了几种制备氮化钛硬质薄膜的新方法、形成机理以及其优缺点,并展望了今后的涂层方法的发展。
TiN hard film has been widely used in recent years for many of its good properties. Several preparation methods of TiN have been introduced and formation mechanics as well as their merits also be described. In the end of the paper the developmental trend has been pointed out.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2006年第F05期236-238,共3页
Materials Reports
基金
国家自然科学基金(编号:50074014)
湖北省自然科学基金(编号:2003ABA092)
