摘要
综述了透明导电氧化物(TCO)薄膜的应用和发展,重点阐述了TCO薄膜的透明导电机理以及制备工艺的最新研究进展,同时对其研究和应用前景进行了展望。
In this paper, the application and development of transparent conducting oxide (TCO) thin films are summarized. This paper specially describes the transparent conducting mechanism and the latest researching progress in preparation methods of TCO thin films. Furthermore, the current prospects in TCO thin films are also simply reviewed.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2006年第F05期317-320,共4页
Materials Reports
基金
"十五"国家预研基金资助
关键词
氧化物薄膜
透明导电机理
制备工艺
ITO
AZO
thin oxidation films, transparent conducting mechanism, preparation methods, ITO, AZO