摘要
利用直流磁控溅射方法制备了质量厚度为200μg.cm-2,直径为20 mm的自支撑金属Zr滤光膜。用同步辐射光源和紫外可见分光光度计分别测量了滤光膜在软X射线和可见光波段的透射率,用俄歇电子能谱(AES)分析了膜中的元素含量。结果表明:Zr膜在13.9 nm波长的透射率达19%,对可见光的抑制性能达43 dB。杂质、膜层氧化及表面污染是影响滤光膜软X射线光谱透射率的主要因素。
200 μg/cm^2 free-standing Zr filters of 20 mm in diameter were made by DC magnetron sputtering. Soft X-ray spectral transmittance of the filters was measured in the National Synchrotron Radiation Laboratory, and the light blocking performanee was tested by speetrophotometer. The elements in Zr filters were analyzed using Auger Eleetron Speetroseopy. The results indicate that Zr filters have good transmlttance(19 % ) at 13.9 nm and perfect visible light blocking properties(43 dB), N,O arisen from background pressure, oxidetion and surface contamination are the major species that affect the transmittance of Zr films in the soft X-ray.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2006年第6期953-956,共4页
High Power Laser and Particle Beams
基金
国家自然科学基金委-中国工程物理研究院联合基金资助课题(10576021)
关键词
ZR
X射线激光
滤光膜
透射率
直流磁控溅射
Zirconium
X-ray laser
Filters
Transmittance
DC magnetron sputtering