摘要
以纳米SiC颗粒悬浊液作为超光滑加工的载体,研制了适合进行超光滑表面加工且具有良好分散性和稳定性的纳米SiC颗粒悬浊液,阐述了悬浊液浮超光滑表面加工的机理,并用该悬浊液对K9光学玻璃进行了加工试验研究,并进行了AFM测试。验证结果表明,加工获得的K9光学玻璃表面粗糙度可以达到Ra=0.84 nm的水平。
Taking the nanometer SiC particle as the carrier of the suspension liquid for the super smooth surface processing, the nanometer SiC suspension liquid with good dispersibility and stability was developed. The mechanism of processing by the suspension liquid was explained. The developed suspension liquid was tested to process the optical glass K9. The results showed that the surface roughness of the processed optical glass tested by AFM reaches Ra = 0.84 nm.
出处
《吉林大学学报（工学版）》
EI
CAS
CSCD
北大核心
2006年第4期518-522,共5页
Journal of Jilin University:Engineering and Technology Edition
基金
国家自然科学基金资助项目(50175049)
关键词
机床
超光滑表面加工
悬浊液
加工机理
machine tool
super smooth surface processing
suspension liquid
processing mechanism
