微空心阴极放电构成的紫外准分子灯

Micro-hollow cathode discharge excimer lamps

根据微空心阴极放电(m icrohollow cathode d ischarge,简称MHCD)的基本结构,设计了一种新颖的放电结构,它利用MHCD与第三电极(金属针)之间构成新的放电方式,产生大体积高电流密度的辉光放电等离子体,利用等离子体中强烈的准分子辐射制作紫外准分子灯。利用该放电结构进行了Xe气的放电实验,实验测到了波长为172nm的强烈准分子辐射;在400Torr气压下放电,大约有15%的内部效率;当21个这样的放电并联运行时,获得了功率密度为15mW/cm2的真空紫外光输出。实验结果表明:利用这种结构能够制作出高功率的紫外准分子灯。

A novel discharge device is designed on base of the basic configuration of microhollow cathode discharge （MHCD）. It is composed of MCHD and the third anode （ metal needle）, and then in parallel connection of it to form the microdischarge array. With the microdischarge array, the high - pressure high - current density glow discharge plasmas can be formed to make UV excimer lamps. The discharge experiment has finished in Xe with the device. High - pressure discharges in xenon were found to be strong sources of excimer radiation at a wavelength of 172 nm. Highest intensities at a wavelength of 172 nm were obtained at a pressure of 400Torr, and the interior efficiency was 15 %. A large area lamp consisting of twenty - one ＂MHCD - needle＂ operating in parallel has been built with 15mW/cm^2 VUV output power per area at the lamps surface. Based on the model and experimental results achieved, the designed discharge device is appropriate for the UV excimer lamps.