摘要
为了方便平面W型微弹簧的设计和制造,对其刚度特性表征方面进行了研究.运用能量方法推导出平面W型微弹簧弹簧常数计算公式.通过镍质平面W型微弹簧的实际拉伸实验,对推导出的微弹簧弹簧常数计算公式进行了验证,公式计算结果与测试结果基本相符.同时在有限元模拟分析软件———ANSYS中进行了仿真计算,二者一致性很好.在公式和仿真计算的基础上,找出了各结构参数对其刚度的影响规律.研究结果为平面W型微弹簧的优化设计与加工提供了理论指导.
To make the design and fabrication of planar W-form micro-springs based on MEMS technology convenient, expressions used to calculate the micro-spring made of different materials constant by its structural parameters are derived by energy method, and subsequently verified correct with tensile test and ANSYS finite element method using nickel planar W-form micro-springs. The stiffness response of the micro-spring to its structural parameters was also analyzed by the formula precedingly derived and the simulation results. Therefore the reliability and the optimization design of MEMS can be improved.
出处
《北京理工大学学报》
EI
CAS
CSCD
北大核心
2006年第6期471-474,共4页
Transactions of Beijing Institute of Technology
关键词
MEMS弹簧
弹簧常数
能量法
有限元方法
MEMS spring
spring constant
energy method
finite element method （FEM）
