空心阴极N^(2+)等离子体放电电子温度的研究

Electron Temperature of Hollow-Cathode N^(2+) Discharge Plasma

利用双层辉光放电空心阴极效应,针对N2发射光谱相对强度的变化,采用SII-IV型全息凹面光栅单色仪对各种工艺参数条件下的光谱进行测绘,获得一系列谱线及测量数据。通过玻尔兹曼方程式求得不同工艺条件下的N2+等离子体的电子温度。并分析了工件电压、源极电压和工作气压对电子温度的影响。结果表明:当工作气压和工件电压一定时,电子温度随源极电压的升高先减小后增大,最后又减小;当源电压一定时,电子温度随工件电压和工作气压的升高而明显减小,并且其减小幅度随源极电压的升高而逐渐降低;当工作气压一定时,工件电压的变化较源极电压的变化对电子温度的影响大。

Electron temperatures in the double glow bollow-cathode, N^2 ＋ discharge plasma, generated under different conditions, were studied by optical emission spectroscopy. Influence of various factors, including work piece voltage, source voltage and N2 pressure, on the electron temperature was discussed. The results show that at a given N2 pressure and work piece voltage, as the source voltage increases, the electron temperature first dicreases, then increases and finally drops;whereas at a fixed source voltage,the electron temperature markedly decreases with the increase of both the N2 pressure and the work piece voltage, and its decrease magnitude reduces with the increase of the source voltage. Moreover, when N2 pressure remains unchanged, the work piece voltage affects the electron temperature much more strongly than the source voltage does.