摘要
本文利用增强型脉冲电弧离子源在硅基底上沉积类金刚石薄膜,拉曼光谱分析表明DLC薄膜中sp3键含量比不加磁过滤装置时脉冲离子源所镀的类金刚石薄膜高,折射率更接近金刚石折射率2.4并且光学带隙也增大,证明用增强型脉冲离子源镀制的类金刚石薄膜sp3键含量提高,性能得到了很大改善。
Diamond-like carbon （DLC） films,grown by enhanced pulsed arc ion plating on silicon substrate, were studied with Raman spectroscopy. The results show that as compared with the control sample, the magnetic falter significantly increases the density of sp^3 in the DLC films and improves its optical properties. Moreover, its refractive index is close to that of the bulk diamond, 2.4, and its optical band-gap widens.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2006年第3期228-231,共4页
Chinese Journal of Vacuum Science and Technology
