在空心微珠表面磁控溅射镀金属薄膜的研究

Plating Metals on Cenosphere Particles by Magnetron Sputtering

本文论述了在空心微珠表面磁控溅射镀金属薄膜的方法。用光学显微镜、场发射扫描电子显微镜、能谱仪和X射线衍射仪对其进行了分析表征。溅射镀膜时,通过控制空心微珠的运动方式,在空心微珠表面沉积了一层均匀性好、附着力强和致密性好的金属镍膜。

High quality nickel films have been successfully plated on cenosphere particles by dc magnetron sputtering at room temperature. The cenosphere particles were characterized with optical microscope, field emission scanning electron microscopy （FESEM）, energy-dispersive spectroscopy （ EDS ） and X-ray diffraction （XRD） in and after the plating. The results show that proper control the motion mode of the particle in plating results in many strengths of the nickel films, such as good uniformity, high compactness, and strong interfacial adhesion.