摘要
本文利用磁力显微镜(MFM)主要研究了由磁控溅射法制备的Co60Fe20B20软磁薄膜的厚度变化(2.5nm^400nm)对薄膜磁畴结构的影响。在室温下观察到垂直各向异性随薄膜厚度的增大而增大。从薄膜的表面形貌像观察到在溅射过程中薄膜温度随薄膜厚度增大而升高。当薄膜厚度小于20nm时,磁畴尺寸随薄膜厚度的增大而增大;当薄膜厚度大于20nm时,磁畴尺寸随薄膜厚度的增大而减小;厚度在20nm附近时,畴壁尺寸达到一个最小值。
In this study the magnetic domains have been investigated in Co60 Fe20 B20 soft magnetic thin films with various film thicknesses （2.5nm - 400nm）. At room temperature the dependence of perpendicular magnetic anisotropy on thickness was observed . Magnetic domain sizes initially decreased as film thieknessos（2.5nm - 20nm） increased, and later domain sizes increased as film thieknessos（20nm - 400nm） increased, and at about 20nm thickness domain size was minimum.
出处
《电子显微学报》
CAS
CSCD
2006年第3期200-203,共4页
Journal of Chinese Electron Microscopy Society
