摘要
针对Nd:YAG激光谐振腔对输出耦合镜的设计要求,研究了梯度反射率镜的设计方法,提出了三种不同的膜系结构,这三种膜系的反射率分布均可满足单横模Nd:YAG激光谐振腔的设计要求。分析计算了设计膜系中变膜厚层沿径向的层厚允差,综合比较了这三种膜系的鲁棒性及镀制工艺的特殊性,确定了可最终付诸实施的梯度反射率镜的膜系结构,即所有膜层改变膜厚的膜系设计。
According to the requirement for output coupler in Nd：YAG laser resonator, the way of designing graded reflectivity mirrors was researched, three formulas structure were put forward, the designed variable reflectance profile could satisfy the single transverse mode Nd：YAG laser resonator. The layer thickness tolerance error of the varying layer along the radius was computed in the designed formula. The robustness and special techniques for film deposition of the three formulas were compared. The designing way of changing all layers thickness was confirmed as the best and feasible way for designing formula.
出处
《红外与激光工程》
EI
CSCD
北大核心
2006年第3期336-340,共5页
Infrared and Laser Engineering
基金
民口配套研制项目(MKPT-03-204)
