摘要
讨论微细加工与装备技术现状,介绍刻蚀技术、LIGA技术和准LIGA技术、微细特种加工等典型的微细加工工艺原理与技术特点,并指出各种加工方法的优缺点,分析微细加工技术的发展走向及装备技术的发展趋势。
The present status of micromachining and furnish technology are presented. The technological principle and technical feature of the typical micromachining are introduced, these typical technology are etching, LIGA and quasi-LIGA technologies, and micro non-traditional machining, but also point out the merits and faults. The trend of development of the micromachining and furnish technology is analysed.
出处
《现代制造工程》
CSCD
2006年第6期143-146,共4页
Modern Manufacturing Engineering
基金
河南省重点学科资助
河南省重点攻关项目(0523021600)
河南省创新人才基金项目(0421001200)
河南省自然科学基金项目(0411053500)
关键词
微细加工
装备
发展趋势
Micromachining Furnish Trend of development
