载体驱动硅微机械陀螺的电学模型研究

Research on Electrical Model of Silicon Micromachined Gyroscope Driven by Carrier

本文针对载体驱动硅微机械陀螺的动力学特性,建立了基于微机械陀螺机械振动特性和电学特性的等效电路模型,利用电学模拟工具Pspice对模型进行了验证。模拟分析与实验结果表明,采用机电模拟方法建立的微机械陀螺电学模型可替代动力学模型,用于接口电路的设计与仿真,利用该模型设计的电路能满足载体驱动硅微机械陀螺性能指标的要求。

In this paper, an equivalent electrical analogue of the micromachined gyroscope driven by carrier is derived from dynamic and electronical characters of the gyroscope. The function of equivalent electrical analogue is verified by using electrical simulation tool-Pspice. The simulation and test results show that the equivalent electrical analogue of the micromachined gyroscope can replace the dynamic model and be used to design and simulate the interface circuits of the gyroscope. The circuits basing on the equivalent electrical analogue can touch the performance stand of the gyroscope.