高分辨率平场全息凹面光栅的研制

Development of Flat Field Holographic Concave Gratings with High-resolution

提出一种利用ZEMAX软件设计、分析评价平场全息凹面光栅的方法。该方法不需要求解复杂的高级像差方程组，兼顾平像场和提高分辨率的效果显著。ZEMAX软件能对设计结果迅速进行评价，减少了人工运算，提高了设计结果的可信度及工作效率。研制了直径Ф=60mm、F／#=3．3和使用波长范围为652～704nm的全息凹面光栅，对设计结果分析表明：在点光源再现情况下，理论分辨率优于0．1nm；在宽度为30μm缝光源再现情况下，理论分辨率优于0．2nm。实际研制结果与理论分析相符。

A method which uses ZEMAX software to design,analyse and evaluate flat field holographic concave grating is given in the paper. This method is simple and efficient in both flat field and improving resolving power. It need not solve any complex high-order aberration equations. To a great extent it can reduce the operation of manual work,enhance the reliability of the design and the work efficiency. An example of flat field holographic concave grating is given, in which the diameter of the concave grating Ф=60 mm, F/#= 3.3, and the range of the reconstruction wavelength is 652-70nm. The design results are analyzed and evaluated in the paper. It shows that： If the spot source is used to reconstruct, theoretical resolution is better than 0.1 nm;lf the slot source,whose width is 30 μm, is used to reconstruct, theoretical resolution is better than 0.2 nm. The experimental results are in good agreement with the theoretical analysis.