带透明电极可变形反射镜的研制

Fabrication of Deformable Mirror with Transparent Electrode

提出了基于微电子机械系统(MEMS)技术的一种新型的带透明电极的可变形反射镜。给出了透明电极、超薄镜面和驱动电极的制作工艺及其工作特性。静态测试结果表明,带透明电极的可变形反射镜驱动电压低,最大变形量可达19μm,有效反射面积可达200 mm2,能很好地改善整个自适应系统的性能。

A novel deformable mirrors is presented with transparent electrode based on micro-electromechanical system（MEMS） technology. The method to design and fabricate the transparent electrode and thinner mirror is proposed as well as their character. The experiment result shows that such a device has 19 μm deflection with small actuating voltages, and the effective reflection area can reach 200 mm^2 ,so it can improve performance in a- daptive optics system.