扩散硅压力传感元件的可靠性问题探讨

An Approach to the Reliability of Diffused Silicon Prssure-sensing Element

本文探讨了工业用扩散硅压力传感元件可靠性的问题,介绍了其应用环境特点、失效模式以及引起失效的种种因素,并从设计和工艺角度出发,给出了防止失效的办法及保证可靠性的措施。

Problems affecting the reliability of sensing element of industrial diffused silicon pressure transducer have been discussed. The application environment, failure mode and factors causing failure of the device have been presented. From the viewpoint of design and technology, the measures preventing failure and assuring reliability have been given.