摘要
介绍了基于PZT驱动的二维微动工作台,该微动台采用双柔性平行四连杆结构。用ANSYS对其进行有限元分析,使用自制的电容位移传感器进行位移检测,采用前馈与模糊控制相结合的复合控制方法对系统进行控制,结果表明:该控制方法既具有开环控制的稳定性,又具有闭环控制高精度的特点。实验证明了该方法的有效性。
A novel 2 - DOF nanopositioning stage drived by PZT was developed, it is based on the dual - flexure - hinge structure. The stage was analyzed by ANSYS, position close examination was performed by capacitance sensor, Efficiency of the method was validated through the experiments.
出处
《机床与液压》
北大核心
2006年第7期11-12,49,共3页
Machine Tool & Hydraulics
基金
国家自然科学基金资助项目(5013504069774020)
