扫描探针机械刻蚀及DPN新技术

Mechanical Lithography by Scanning Probe and the New Technology of DPN

扫描探针显微镜(SPM)作为高精度显微工具的同时,还可以作为加工工具对样品表面进行刻蚀加工。扫描探针刻蚀加工技术(SPL)近年来发展迅速。本文综述了基于SPM的扫描探针机械刻蚀技术,并介绍了DPN技术的机理及最新研究进展。

Scanning probe microscopy can be used not only as a microscopical tool of high precision, but also as a lithographical tool to sample, In these years the technology of scanning probe lithography has made a great development. The current development of scanning probe mechanical lithography and the DPN were introduced.